EpiTech SmartCBr4™ Controller

EpiTech has developed a customizable carbon tetrabromide gas manifold controller, designed as a state machine to control the valves and vacuum pressure of a CBr4 manifold used in carbon doping of MBE grown films. The standard design was created to control 5 valves and can be programmed to automatically transition from OFF to RUN and back and the sequence of valve movements and times for each can be chosen by the user. The controller has two interlocks that can be programmed to the force the controller to transition to any existing state. It communicates with legacy and modern MBE control software using both EI Bi-synch and Modbus RTU (serial) and Modbus TCP (Ethernet) and like the legacy hardware it is designed to replace, the controller appears as two separate devices to the control software (state machine and pressure controller). The touch screen interface makes adjusting the settings on the controller and the MKS 651C quick and easy. The Local / Remote button allows the user to isolate the controller from software interference and also prevents unwanted changing of state from the front panel.

For purchases, custom electronics, or questions, contact us directly.

The MKS 651C controller and valve are products of MKS, Inc.

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